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Ge Mao Rubber Industrial Co., Ltd.
Tel: +886-4-7810288 Fax: +886-4-7810289
No. 15, Kung Yeh East 4th Rd., Lukang, Chang Hua 505, Taiwan, R.O.C.

Perfrez® 9021C Perfluoroelastomer for Semiconductor Fabrication

Perfrez® 9021C is a high performance semiconductor grade perfluoroelastomer compound that is specially formulated for use under the most severe thermal and chemical environments in many dry and wet processes that is commonly found in semiconductor manufacturing. Characterised by its low compression set, Perfrez® 9021C is a black compound which exhibits extraordinary stability throughout temperature cycles. 9021C offers outstanding chemical and thermal resistance with enhanced mechanical properties, and is suited for use in the most demanding environments where seals are exposed to reactive plasma.

Resistance to Special Environments

Where hydrofluorocarbon elastomers fail to deliver expected service life under severe operating conditions, perfluoroelastomers (FFKM) is the product of choice. Perfluoroelastomers can withstand corrosive oxidising agents and acids, and resist the degrading effects of organic and inorganic bases. Perfrez® 9021C delivers all of the exceptional properties of perfluoroelastomers, along with excellent thermal stability for prolonged service life at continuous service temperature of 310 degrees C.

Plasma Resistance Properties

Elastomer sealing components when exposed to reactive plasmas and corrosive gases during wafer fabrication processes undergo degradation resulting in weight loss. Sealing components that forms a part of the equipment used in the production of semiconductor devices must meet the exceptionally stringent performance requirements of low weight loss and reduced residue formation. The generation of residue as a result of attack by plasmas causes contamination, which is detrimental to the semiconductor devices been manufactured.

Perfrez® 9021C is fabricated from perfluoroelastomers which are naturally resistant to reactive plasmas and superior to most general use elastomer sealing compounds. The plasma resistance properties of Perfrez® 9021C is further enhanced by using compounding additives, resulting in end-products that last for longer durations when exposed to reactive plasmas. Perfrez® 9021C exhibits lower weight loss and less degradation than similar perfluoroelastomers compounds that have not undergone such properties enhancements.

Low Compression Set

The extend to which a material is able to retain its form, dimensions and elasticity upon the release of a sustained force is known as compression set resistance. Temperature will affect a material's compression set resistance as a higher temperature corresponds to an increase in material aging. Perfrez® 9021C offers lower compression set resistance than other competing products based on comparative temperature ratings.

Low Volume Swell

Volume swell is an indicator of an elastomer's fluid compatibility. Elastomer seals, o-rings and gaskets are susceptible to swelling and degradation as a result of the absorption of gas or fluid. Swelling increases friction and reduces abrasion resistance and toughness, and also results in contamination and the reduction of service life. Perfrez® 9021C has exceptional low volume swell, as determined by chemical compatibility tests.

Thermal and Chemical Resistance

Perfrez® 9021C satisfies all the requirements of sealing components under the most extreme and challenging thermal and chemical environments.

Major Application

Perfrez® 9021C seals deliver all of the high performance properties of perfluoroelastomers and is widely used by manufacturers of equipment over an extensive range of industries.

l Chemical processing industry
l Aeronautical / aerospace
l Petrochemical
l Pharmaceutical and food industry
l Semiconductor fabrication
l Oil and gas extraction and processing
l Power generation
l Hydrocarbon processing

More Benefits

Perfrez® 9021C sealing components offer our customers advantages by combining product performance with dedicated service and technical support:

l Reliability meaning into lower operating cost and longer intervals between scheduled maintenance.
l Longer service life resulting in productivity increase and cost reduction.
l Increase in operational safety and reliability.
l Product standardisation resulting in inventory reduction.

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